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Low-energy Ion Source System I The low-energy ion source system I was designed and fabricated in Japan through Doshisha University. |
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| Low-energy Ion Source System II |  |
| Magnetron Sputtering System |  |
| 13.56 MHz RF Plasma System (Low Vacuum) |  |
| 13.56 MHz RF Plasma System (High Vacuum) |  |
| PECVD System | |
| DC Plasma System |  |
| Microwave Plasma System |  |
| Magnetized Sheet Plasma System |  |
| Atmospheric Pressure Plasma Jet | |
| Vacuum Evaporator |  |
| Electrospinning System |
